Scanning Electron Microscope

Description

Accelerating Voltage:
– 53 steps
– 0.5 to 3 kV: Variable in 100 V steps
– 3 to 30 kV: Variable in 1 kV step
– Resolution:
High vacuum mode
Secondary electron image (SEI)
+ 3.0 nm (Acc. V 30 kV, 8mm WD)
+ 8.0 nm (Acc. V 3 kV, 6mm WD)
+ 15.0 nm (Acc. V 1 kV, 6mm WD)
Low vacuum mode:
Backscattered electron image (BEI):
– 4.0 nm (Acc. V 30 kV, 5mm WD)
– Signal:
High-vacuum mode
+ SEI (E.T. detector)
+ BEI (composition, topographic and stereoscopic images by semiconductor detector)
Low-vacuum mode
+ BEI (composition, topographic and stereoscopic images by semiconductor detector)
– Magnification
+ Screen magnification: ×14 to ×839,724 (Magnification defined with the display size 358 mm × 269 mm)
– Probe current: 1 pA to l µA when using the movable aperture
– Pressure range: 10 to 100 Pa

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